TY  - JOUR
AU  - Nguyen, Nhan
AU  - Chandler-Horowitz, Deane
AU  - Amirtharaj, Paul
AU  - Pellegrino, Joseph
C2  - Applied Physics Letters
DA  - 1994-05-16 00:05:00
LA  - en
M1  - 64
PB  - Applied Physics Letters
PY  - 1994
TI  - Spectroscopic Ellipsometry Determination of the Properties of the Thin Underlying Strained Si Layer and the Roughness at SiO<sub>2</sub>/Si Interface
ER  -