TY  - CONF
AU  - Tsai, B
AU  - f, J Lovas
AU  - DeWitt, D
AU  - Kreider, Kenneth
AU  - g, Burns Burns
C2  - 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA, USA
DA  - 1997-09-03 00:09:00
LA  - en
M1  - 5
PB  - 5th International Conference on Advanced Thermal Processing of Semiconductors, New Orleans, LA, USA
PY  - 1997
TI  - In Chamber Thermometry Calibration Using A Si Proof Wafer
ER  -