TY  - JOUR
AU  - Kopanski, Joseph
AU  - Mayo, Santos
C2  - Applied Physics Letters
DA  - 1998-05-11 00:05:00
LA  - en
M1  - 72
PB  - Applied Physics Letters
PY  - 1998
TI  - Intermittent-Contact Scanning Capacitance Microscope for Lithographic Overlay Measurement
ER  -