TY  - JOUR
AU  - Khera, D.
AU  - Cresswell, Michael
AU  - Linholm, Loren
AU  - Ramanathan, G.
AU  - Buzzeo, J.
AU  - Nagarajan, A.
C2  - IEEE Transactions on Engineering Management
DA  - 1994-05-01 00:05:00
LA  - en
M1  - 41
PB  - IEEE Transactions on Engineering Management
PY  - 1994
TI  - Increasing Profitability and Improving Semiconductor Manufacturing Throughput Using Expert Systems
ER  -