TY  - CONF
AU  - Nguyen, Nhan
AU  - Chandler-Horowitz, Deane
AU  - Pellegrino, Joseph
AU  - Amirtharaj, Paul
C2  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - Semiconductor Characterization -  Present Status and Future Needs, Gaithersburg, MD, USA
PY  - 1995
TI  - High-Accuracy Principal-Angle Scanning Spectroscopic Ellipsometry of Semiconductor Interfaces
ER  -