TY  - CONF
AU  - Lee, W.
AU  - Guthrie, William
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Sniegowski, J.
AU  - Linholm, Loren
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
PY  - 1997
TI  - Reference-Length Shortening by Kelvin Voltage in Linewidth Test Structures Replicated in Mono-Crystalline Silicon Films
ER  -