TY  - JOUR
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Ghoshtagore, Rathindra
AU  - Linholm, Loren
AU  - Sniegowski, J.
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1998-05-01 00:05:00
LA  - en
M1  - 11
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1998
TI  - Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications
ER  -