TY  - CONF
AU  - Khera, D.
AU  - Cresswell, Michael
AU  - Linholm, Loren
AU  - Ramanathan, G.
AU  - Buzzeo, J.
AU  - Nagarajan, A.
C2  - Proc., International Semiconductor Manufacturing Science Symposium, Burlingame, CA, USA
DA  - 1990-12-31 00:12:00
LA  - en
PB  - Proc., International Semiconductor Manufacturing Science Symposium, Burlingame, CA, USA
PY  - 1990
TI  - Knowledge Extraction Techniques for Expert System Assisted Wafer Screening
ER  -