TY  - CONF
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Lowney, J
C2  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
PY  - 1995
TI  - Scanning Capacitance Microscopy Measurements and Modeling: Progress Towards Dopant Profiling of Silicon
ER  -