TY - JOUR AU - Milanovic, V. AU - Gaitan, Michael AU - Zaghloul, Mona C2 - IEEE Transactions on Microwave Theory and Techniques DA - 1998-05-01 00:05:00 LA - en M1 - 46 PB - IEEE Transactions on Microwave Theory and Techniques PY - 1998 TI - Micromachined Thermocouple Microwave Detector by Commercial CMOS Fabrication ER -