TY  - JOUR
AU  - Milanovic, V.
AU  - Gaitan, Michael
AU  - Bowen, E.
AU  - Zaghloul, Mona
C2  - IEEE Microwave and Guided Wave Letters
DA  - 1996-10-01 00:10:00
LA  - en
M1  - 6
PB  - IEEE Microwave and Guided Wave Letters
PY  - 1996
TI  - Micromachined Coplanar Waveguides in CMOS Technology
ER  -