TY - CONF AU - Milanovic, V. AU - Gaitan, Michael AU - Bowen, E. AU - Tea, N. AU - Zaghloul, Mona C2 - Proc., 1997 International Conference on Solid-State Sensors and Actuators - Transducers'97, Chicago, IL, USA DA - 1997-12-31 00:12:00 LA - en M1 - 2 PB - Proc., 1997 International Conference on Solid-State Sensors and Actuators - Transducers'97, Chicago, IL, USA PY - 1997 TI - Design and Fabrication of Micromachined Passive Microwave Filtering Elements in CMOS Technology ER -