TY  - CONF
AU  - Cresswell, Michael
AU  - Sniegowski, J.
AU  - Ghoshtagore, Rathindra
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Linholm, Loren
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Monterey, CA, USA
PY  - 1997
TI  - Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference Material Applications
ER  -