TY  - CONF
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Linholm, C.
AU  - Hood, Colleen
AU  - Penzes, William
AU  - Teague, E
C2  - Proc.,  IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP
DA  - 1993-12-31 00:12:00
LA  - en
PB  - Proc.,  IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP
PY  - 1993
TI  - Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
ER  -