TY  - CONF
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Linholm, Loren
AU  - Guthrie, William
AU  - Gurnell, A.
C2  - Proc., 1996 IEEE International Conference on Mircroelectronic Test Structures, Trento, 1, IT
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 9
PB  - Proc., 1996 IEEE International Conference on Mircroelectronic Test Structures, Trento, 1, IT
PY  - 1996
TI  - Hybrid Optical-Electrical Overlay Test Structure
ER  -