TY  - CONF
AU  - Cresswell, Michael
AU  - Penzes, William
AU  - Allen, Richard
AU  - Linholm, Loren
AU  - Hood, Colleen
AU  - Teague, E
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
M1  - 2196
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA
PY  - 1994
TI  - Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
ER  -