TY  - CONF
AU  - Guillaume, Nadine
AU  - Lahti, Markku
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Linholm, Loren
AU  - Zaghloul, Mona
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA
DA  - 2002-10-01 00:10:00
LA  - en
M1  - 4562
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Monterey, CA, USA
PY  - 2002
TI  - Non-contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks
ER  -