TY  - CONF
AU  - Smith, Stewart
AU  - McCallum, Martin
AU  - Hourd, Andrew
AU  - Stevenson, J.
AU  - Walton, Anthony
AU  - Dixson, Ronald
AU  - Allen, Richard
AU  - Potzick, James
AU  - Cresswell, Michael
AU  - Orji, Ndubuisi
C2  - Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK
DA  - 2008-03-24 00:03:00
LA  - en
PB  - Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK
PY  - 2008
TI  - Comparison of Measurement Techniques for Advanced Photomask Metrology
ER  -