TY - JOUR AU - Cresswell, Michael AU - Allen, Richard AU - Guthrie, William AU - Murabito, Christine AU - Dixson, Ronald AU - Hunt, Amy C2 - IEEE Transactions on Instrumentation and Measurement DA - 2008-01-01 00:01:00 LA - en M1 - 57 PB - IEEE Transactions on Instrumentation and Measurement PY - 2008 TI - Comparison of SEM and HRTEM CD Measurements Extracted from Test-Structures Having Feature Linewidths from 40 nm to 240 nm UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32240 ER -