TY - CONF AU - Milanovic, V. AU - Bowen, E. AU - Tea, N. AU - Gaitan, Michael AU - Zaghloul, Mona C2 - Proc., American Society of Engineers Conference, Anaheim, CA, USA DA - 1998-11-12 00:11:00 LA - en PB - Proc., American Society of Engineers Conference, Anaheim, CA, USA PY - 1998 TI - Convective Accelerometer and Tilt Sensor in CMOS Technology ER -