TY  - JOUR
AU  - Cresswell, Michael
AU  - Bonevich, John
AU  - Allen, Richard
AU  - Guillaume, Nadine
AU  - Giannuzzi, Lucille
AU  - Everist, Sarah
AU  - Murabito, Christine
AU  - Shea, Patrick
AU  - Linholm, Loren
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2001-11-01 00:11:00
LA  - en
M1  - 14
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2001
TI  - Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
ER  -