TY - JOUR AU - Sayan, Safak AU - Croft, Mark AU - Nguyen, Nhan AU - Emge, Tom AU - Gusev, Evgeni AU - Kim, Hyunjung AU - Ehrstein, James AU - McIntyre, Paul AU - Garfunkel, Eric C2 - Applied Physics Letters DA - 2005-09-01 00:09:00 LA - en M1 - 15 PB - Applied Physics Letters PY - 2005 TI - Amorphous to Tetragonal Transition in Ultrathin Zirconia Films: Effect on the Electronic and Dielectric Properties ER -