TY  - JOUR
AU  - Nguyen, Nhan
AU  - Maslar, James
AU  - Kim, Junghyeun
AU  - Han, Jin-Ping
AU  - Park, Jin-Won
AU  - Chandler-Horowitz, Deane
AU  - Vogel, Eric
C2  - Applied Physics Letters
DA  - 2004-10-04 00:10:00
LA  - en
M1  - 85
PB  - Applied Physics Letters
PY  - 2004
TI  - Crystalline Quality of Bonded Silicon-On-Insulator Characterized by Spectroscopic Ellipsometry and Raman Spectroscopy
ER  -