TY  - CHAP
AU  - Knight, Stephen
AU  - Prabhu, Vivek
AU  - Burnett, John
AU  - Liddle, James
AU  - Soles, Christopher
AU  - Diebold, Alain
C2  - Handbook of Nanophysics, Taylor & Francis, London, -1
DA  - 2011-03-01 00:03:00
LA  - en
PB  - Handbook of Nanophysics, Taylor & Francis, London, -1
PY  - 2011
TI  - Nanoelectronics Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901888
ER  -