TY  - JOUR
AU  - Myers, Grant
AU  - Hazra, Siddharth
AU  - Boer, Maarten de
AU  - Michaels, Chris
AU  - Stranick, Stephan
AU  - Koseski, Ryan
AU  - Cook, Robert
AU  - DelRio, Frank
C2  - Applied Physics Letters
DA  - 2014-06-15 00:06:00
DO  - https://doi.org/10.1063/1.4878616
LA  - en
M1  - 104
PB  - Applied Physics Letters
PY  - 2014
TI  - Stress mapping of micromachined polycrystalline silicon devices via confocal Raman microscopy
ER  -