TY  - JOUR
AU  - Stan, Gheorghe
AU  - Ciobanu, Cristian
AU  - Levin, Igor
AU  - van, Mark
AU  - Myers, Alan
AU  - Singh, Kanwal
AU  - Jezewski, Christopher
AU  - Miner, Barbara
AU  - King, Sean
C2  - Nano Letters
DA  - 2015-05-07
LA  - en
PB  - Nano Letters
PY  - 2015
TI  - Nanoscale buckling of ultrathin low-k dielectric lines during hard-mask patterning
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917567
ER  -