TY  - CONF
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Henn, Mark-Alexander
AU  - Sohn, Martin
AU  - Silver, Richard
C2  - Proceedings of the SPIE, Munich, DE
DA  - 2017-06-25 04:06:00
DO  - https://doi.org/10.1117/12.2271149
LA  - en
M1  - 10330
PB  - Proceedings of the SPIE, Munich, DE
PY  - 2017
TI  - Optimizing image-based patterned defect inspection through FDTD simulations at multiple ultraviolet wavelengths
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923390
ER  -