TY  - CONF
AU  - Barnes, Bryan
AU  - Zhou, Hui
AU  - Henn, Mark-Alexander
AU  - Sohn, Martin
AU  - Silver, Richard
C2  - Proceedings of the SPIE, San Jose, CA, US
DA  - 2017-03-29 04:03:00
DO  - https://doi.org/10.1117/12.2262191
LA  - en
M1  - 10145
PB  - Proceedings of the SPIE, San Jose, CA, US
PY  - 2017
TI  - Assessing the wavelength extensibility of optical patterned defect inspection
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923116
ER  -