TY  - CONF
AU  - Barnes, Bryan
AU  - Henn, Mark-Alexander
AU  - Zhou, Hui
AU  - Sohn, Martin
AU  - Silver, Richard
C2  - 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
DA  - 2017-03-19 04:03:00
LA  - en
PB  - 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
PY  - 2017
TI  - Assessing Quantitative Optical Imaging for Realizing In-die Critical Dimension Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923066
ER  -