TY  - JOUR
AU  - Thompson, P.E.
AU  - Jernigan, G.G.
AU  - Simons, David S.
AU  - Chi, P.
AU  - Jonker, B.T.
AU  - Erve, O.M.J. van 't
C2  - Thin Solid Films
DA  - 2009-10-22 04:10:00
LA  - en
PB  - Thin Solid Films
PY  - 2009
TI  - Phosphorus Doping of Silicon at Substrate Temperatures Above 600 °C
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902765
ER  -