TY  - JOUR
AU  - Maslar, James E.
AU  - Kimes, William A.
AU  - Sperling, Brent
AU  - Kanjolia, Ravindra
C2  - Applied Spectroscopy
DA  - 2020-08-24 04:08:00
DO  - https://doi.org/10.1177/0003702819885182
LA  - en
M1  - 74
PB  - Applied Spectroscopy
PY  - 2020
TI  - Non-dispersive infrared gas analyzer for partial pressure measurements of a tantalum alkylamide during vapor deposition processes
ER  -