TY  - CONF
AU  - Cresswell, Michael
AU  - Davidson, M
AU  - Mijares, Geraldine
AU  - Allen, Richard
AU  - Geist, Jon
AU  - Bishop, M
C2  - Proceedings of the 2009 International Conference on Microelectronic Test Structures, Oxnard, CA
DA  - 2009-04-02
LA  - en
PB  - Proceedings of the 2009 International Conference on Microelectronic Test Structures, Oxnard, CA
PY  - 2009
TI  - Mapping the Edge-Roughness of Test Structure Features for Nanometer-Level CD Reference-Materials
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901520
ER  -