TY - JOUR
AU - Wagner, M
AU - Gillen, J Greg
C2 - Applied Surface Science
DA - 2017-02-19 20:02:57
LA - en
PB - Applied Surface Science
PY - 2017
TI - Impact Energy Dependence of SF5+ Ion Beam Damage of Poly(Methyl Methacrylate) Studied by Time-of-Flight Secondary Ion Mass Spectrometry
ER -