TY - JOUR AU - Schenck, Peter AU - Kaiser, Debra L. C2 - Proceedings of the Knowledge Foundation, COMBI 2002 DA - 2017-02-19 20:02:57 LA - en PB - Proceedings of the Knowledge Foundation, COMBI 2002 PY - 2017 TI - Combinatorial Tools for Inorganic Thin Films ER -