TY  - JOUR
AU  - Lin, Eric
AU  - Jones, Ronald
AU  - Wu, Wen-Li
AU  - Barker, John
AU  - Bolton, P
AU  - Barclay, Z
C2  - SPIE Meeting
DA  - 2008-10-16 14:10:19
LA  - en
PB  - SPIE Meeting
PY  - 2008
TI  - Structural Characterization of Deep Sub-Micron Lithographic Structures Using Angle Neutron Scattering
ER  -