TY  - JOUR
AU  - Lin, Eric
AU  - Pochan, D
AU  - Kolb, R
AU  - Wu, Wen-Li
AU  - Satija, Sushil K.
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 2008-10-16 14:10:19
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 2008
TI  - Neutron Reflectivity for Interfacial Materials Characterization
ER  -