TY - JOUR AU - Burnett, John AU - Griesmann, Ulf AU - Gupta, R AU - Jou, T C2 - International Symposium on Microelectronics DA - 2008-10-16 14:10:14 LA - en PB - International Symposium on Microelectronics PY - 2008 TI - Index of Retraction and its Temperature Dependence of Calcium Fluoride Near 157nm ER -