TY  - JOUR
AU  - Maslar, James
AU  - Hurst, Wilbur
AU  - Burgess, Donald
AU  - Kimes, William
AU  - Nguyen, Nhan
C2  - ECS Transactions
DA  - 2007-01-01
DO  - https://doi.org/10.1149/1.2408909
LA  - en
M1  - 2
PB  - ECS Transactions
PY  - 2007
TI  - In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition
ER  -