TY  - JOUR
AU  - Bright, David
AU  - Scott, Jake
C2  - Journal of Microscopy-Oxford
DA  - 2008-10-16 14:10:10
LA  - en
PB  - Journal of Microscopy-Oxford
PY  - 2008
TI  - Beam Tilt, Defocus, and Vibration Contribute to HRTEM Gate Dielectric Thickness Measurement Uncertainty
ER  -