TY  - JOUR
AU  - Landree, E
AU  - Jach, Terrence J.
C2  - Materials Research Society Symposium
DA  - 2008-10-16 14:10:10
LA  - en
PB  - Materials Research Society Symposium
PY  - 2008
TI  - Characterization of Ultrathin Silicon-Oxynitride Films Using Grazing Incidence X-Ray
ER  -