TY  - CONF
AU  - Madison, Andrew
AU  - Villarrubia, John S.
AU  - Liao, Kuo-Tang
AU  - Schumacher, Joshua
AU  - Siebein, Kerry
AU  - Ilic, Robert
AU  - Liddle, James Alexander
AU  - Stavis, Samuel M.
C2  - The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
DA  - 2022-06-20 04:06:00
LA  - en
PB  - The 2022 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
PY  - 2022
TI  - An Unconventional Tradespace of Focused-Ion-Beam Machining
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934056
ER  -