TY - CONF AU - Lyu, X. AU - Si, M. AU - Shrestha, Pragya AU - Cheung, Kin (Charles) AU - Ye, P. D. C2 - 2021 5th IEEE Electron Devices Technology Manufacturing Conference (EDTM), Chengdu, CN DA - 2021-05-12 04:05:00 DO - https://doi.org/10.1109/EDTM50988.2021.9421035 LA - en PB - 2021 5th IEEE Electron Devices Technology Manufacturing Conference (EDTM), Chengdu, CN PY - 2021 TI - Dynamics studies of polarization switching in ferroelectric hafnium zirconium oxide ER -