TY  - JOUR
AU  - Kanwal, Alokik
AU  - Ilic, Robert
AU  - Ray, Christopher
AU  - Siebein, Kerry
AU  - Liddle, James Alexander
C2  - Micro and Nano Engineering
DA  - 2022-08-01 04:08:00
DO  - https://doi.org/10.1016/j.mne.2022.100145 
LA  - en
M1  - 16
PB  - Micro and Nano Engineering
PY  - 2022
TI  - Chromium Oxide – A Novel Sacrificial Layer Material for MEMS/NEMS and Micro/Nanofluidic Device Fabrication
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933440
ER  -