TY  - JOUR
AU  - Kim, Taekyung
AU  - Cho, Eikhyun
AU  - Bae, Yoon Sung
AU  - Choi, Sang-Soo
AU  - Barnes, Bryan
AU  - Silver, Richard M.
AU  - Sohn, Martin
C2  - Optics and Lasers in Engineering
DA  - 2022-02-01 05:02:00
DO  - https://doi.org/10.1016/j.optlaseng.2022.106953
LA  - en
M1  - 152
PB  - Optics and Lasers in Engineering
PY  - 2022
TI  - Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932950
ER  -