TY  - VIDEO
AU  - Windover, Donald
AU  - Vartanian, Victor
AU  - Kelly, Tom
AU  - Larson, Tom
AU  - Gil, David
C2  - SEMATECH Technology Transfer #11035149A-TR
DA  - 2011-07-22 04:07:00
LA  - en
PB  - SEMATECH Technology Transfer #11035149A-TR
PY  - 2011
TI  - Thickness and Composition Reference Standards for Semiconductor Metrology
ER  -