TY  - JOUR
AU  - Soles, Christopher
AU  - Kasica, Richard
AU  - Lee, Hae-Jeong
AU  - Sim, Jae
AU  - Lee, Sung-Il
AU  - Kim, Ki-Bum
AU  - Kim, Hyun-Mi
AU  - Yoon, Do
C2  - Applied Organometallic Chemistry
DA  - 2013-02-28 05:02:00
DO  - https://doi.org/10.1002/aoc.2985
LA  - en
PB  - Applied Organometallic Chemistry
PY  - 2013
TI  - Organosilicate Polymer E-Beam Resists with High Resolution, Sensitivity and Stability
ER  -