TY  - JOUR
AU  - Hyun, 
AU  - Lee, Hae-Jeong
AU  - Lin, Eric
AU  - Karim, Alamgir
AU  - Hines, Daniel
AU  - Yoon, Do
AU  - Soles, Christopher
C2  - SPIE
DA  - 2008-03-28
LA  - en
M1  - 6921
PB  - SPIE
PY  - 2008
TI  - Nanoimprint Lithography for the Direct Patterning of Nanoporous Interlayer Dielectric Insulator Materials
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852733
ER  -