TY  - JOUR
AU  - Wang, Chengqing
AU  - Jones, Ronald
AU  - Choi, Kwang-Woo
AU  - Soles, Christopher
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Clarke, James
AU  - Villarrubia, John
AU  - Bunday, Benjamin
C2  - SPIE Conference Proceedings
DA  - 2008-03-24
LA  - en
M1  - 6922
PB  - SPIE Conference Proceedings
PY  - 2008
TI  - Line Width Roughness and Cross Sectional Measurements of Sub-50 nm Structures with CD-SAXS and CD-SEM
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853580
ER  -