TY  - CONF
AU  - Maslar, James
AU  - Hurst, Wilbur
AU  - Burgess, Donald
AU  - Kimes, William
AU  - Nguyen, Nhan
AU  - Moore, Elizabeth
AU  - Hodges, Joseph
C2  - ECS Transactions, Volume 13, Issue 2, Phoenix, AZ
DA  - 2008-01-01
LA  - en
M1  - 13
PB  - ECS Transactions, Volume 13, Issue 2, Phoenix, AZ
PY  - 2008
TI  - In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832216
ER  -