TY - CONF AU - Osborn, William Alexander AU - Friedman, Lawrence Henry AU - Vaudin, Mark C2 - Microscopy and Microanalysis 2017, St Louis, MO, US DA - 2017-08-07 04:08:00 LA - en PB - Microscopy and Microanalysis 2017, St Louis, MO, US PY - 2017 TI - Strain Measurement of 3D Structured Nanodevices by EBSD ER -